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湿法腐蚀技术——2019神灯奖申报技术

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2019-03-13 作者: 来源:山东元旭光电股份有限公司 浏览量: 网友评论: 0

摘要: 湿法腐蚀技术,为山东元旭光电股份有限公司2019神灯奖申报技术。


项目名称: 湿法腐蚀技术

Wet Etching Technology

申报单位: 山东元旭光电股份有限公司

综合介绍或申报理由:

1、湿法腐蚀技术用于蓝宝石衬底刻蚀,得到的WPSS衬底能够用于LED发光芯片的制作,并且较常规干法工艺得到的产品电压低,良率和稳定性高。

2、WPSS相对常规PSS性价比高


1、Wet etching technology is used for sapphire substrate etching. The obtained WPSS substrate can be used in the fabrication of LED chip, and the voltage is lower, the yield and stability are higher than those obtained by conventional dry process.

2、 Compared with conventional PSS, WPSS has a higher performance-price ratio.


主要技术参数:

下图

与国内外同类产品或同类技术的比较情况:

图形化蓝宝石衬底(PSS)有利于GaN外延层的应力弛豫,且能抑制外延生长过程中向上延升的位错密度,从而提高器件的内量子效率,同时图形化衬底能使原本在临界角范围外的光线通过图形的反射重新进入临界角内,从而提高发光效率。 投资低,效率高,产品均匀性好;生产使用的酸经中和后,无危废产生。目前我们是唯一一家生产WPSS 的厂家。


The graphical sapphire substrate (PSS) is beneficial to the stress relaxation of the GaN epitaxial layer, and can inhibit the upward rise of dislocation density during the epitaxial growth process, thus improving the internal quantum efficiency of the device. At the same time, the graphic substrate can make the light outside the critical angle reenter into the critical angle through the reflection of the pattern, so as to improve the luminous efficiency. Low investment, high efficiency, good uniformity of products, production and use of acid neutralization, no waste. At present, we are the only manufacturer of WPSS.


经济评价分析:

产品性价比高,制作过程无污染,应用到芯片后得到的发光芯片电压低,产品质量更稳定。


The product has the advantages of high cost performance, no pollution during the manufacturing process, low voltage of the light-emitting chip obtained after application to the chip, and more stable product quality.


技术及工艺创新要点:

通过高温酸腐蚀的工艺得到的PSS,片内均匀性,批次一致性,光型一致性,外延生长匹配等均提高


The PSS, on-chip uniformity, batch consistency, light-type consistency, epitaxial growth matching, and the like obtained by the process of high-temperature acid etching are all improved


实际运用案例和用户评价意见:

公司因湿法衬底稳定性高被乾照光电评委优秀供应商,2015-2018年新广联全部使用我司湿法衬底,并给予产品先进性评价。详见附件

获奖、专利情况:

我公司获得2015年中国第四届创新创业大赛优秀奖,2016年被评为高新技术企业,并且获得相关发明专利。详见附图

申报单位介绍:

元旭光电定位于纳微米尺寸产品研发、制造,通过LED用图形蓝宝石衬底(PSS)快速切入市场,并将产品线逐步拓展到Micro-LED芯片、医疗美容微针、经皮给药芯片等应用市场,逐步打造成为以创新技术为支撑的微纳米光电子及生物医疗产品提供商。

Novoshine located in nano-micron size products research and development, manufacturing, through LED graphics sapphire substrate (PSS) fast cut into the market, and gradually expand the product line to Micro-LED chip, medical beauty micro-needle, transdermal drug delivery chip and other application markets, Gradually build with innovative technology as the support of micro-nano optoelectronics and bio-medical products provider.

产品图片:

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